- manufacturer
- Evatec
- Type
- Solaris S151
- Manufacture Date
- 2007
- Description
- Order No.: 3002909, Equipment No.: 101019726, U: 400 volts, I: 100 A, f: 50/60Hz, P: 120kVA
-Less used laboratory system for coating of silicon substrates
-In 2017/2018 the system was refurbished and expanded with an RF module
-In 2021 the system was expanded with an Boron Target module
-Rotary vacuum pumps Leybold Trivac B
-GUI cannot be seen in the pictures as it is kept safe
-With transport frame and lifting gear
-Various spare parts and consumables
Viewing:
Viewing is possible at any time. Please schedule your visit.
Contact person:
Nils Brinkmann, Tel. (+49) 040 355059-190, Email: brinkmann@netbid.com - by order of:
- Angermann Machinery & Equipment GmbH & Co. KG
*** ended *** Evatec Solaris S151 multi-chamber sputtering system
PreviousAuction Type
Trading Premium- ends:
- 10/01/2024
- number of bids:
- 1 Gebot
- Status:
- Sold
- Item no.:
- X17388-1
- surcharge
- 18.00%
multi-chamber sputtering system
Item no.: X17388-1
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Details multi-chamber sputtering system
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Contact
Sabine Egerland, Tel. (+49) 040 355059-225, Email: egerland@netbid.com