multi-chamber sputtering system Evatec Solaris S151

Order No.: 3002909, Equipment No.: 101019726, U: 400 volts, I: 100 A, f: 50/60Hz, P: 120kVA

-Less used laboratory system for coating of silicon substrates

-In 2017/2018 the system was refurbished and expanded with an RF module

-In 2021 the system was expanded with an Boron Target module

-Rotary vacuum pumps Leybold Trivac B

-GUI cannot be seen in the pictures as it is kept safe

-With transport frame and lifting gear

-Various spare parts and consumables

Viewing:
Viewing is possible at any time. Please schedule your visit.

Contact person:
Nils Brinkmann, Tel. (+49) 040 355059-190, Email: brinkmann@netbid.com